ABOUT THE COMPANY
A leading provider of advanced plasma and vacuum process technologies tailored for research and emerging production environments.
Our History
Advanced Vacuum became part of Plasma-Therm in 2011, bringing together two organizations committed to delivering innovative vacuum and plasma processing solutions. As Advanced Vacuum by Plasma-Therm, we continue to build on a legacy of technical excellence, offering advanced etch and deposition technologies to support research, development, and production across a wide range of industries
TIMELINE
– 1974
Plasma-Therm founded
– 1995
Versalock®: cluster tool
– 2000
Acquisition by Swiss holding company Unaxis (later named Oerlikon)
– 2005
VERSALINE®: plasma system
– 2006
– Mask Etcher® V: for production below 32 nm
– 2009
Management buyout re-established Plasma-Therm
– 2011
Plasma-Therm acquires Advanced Vacuum Europe
– 2013
Singulator® 300mm system
– 2016
DISCO Corp. signs global distribution agreement for Plasma-Therm’s plasma dicing technology
– 2017
Plasma-Therm partners with memsstar to offer complete solutions for MEMS fabrication
– 2018
Acquired OEM Group Dry Process Business
– 2020
Acquired specialty engineering company, JLS Designs Ltd
– 2020
Acquired OEM Group Dry Process Business
TIMELINE
– 1974
Plasma-Therm founded
– 1995
Versalock®: cluster tool
– 2000
Acquisition by Swiss holding company Unaxis (later named Oerlikon)
– 2005
VERSALINE®: plasma system
– 2006
– Mask Etcher® V: for production below 32 nm
– 2009
Management buyout re-established Plasma-Therm
– 2011
Plasma-Therm acquires Advanced Vacuum Europe
– 2013
Singulator® 300mm system
– 2016
DISCO Corp. signs global distribution agreement for Plasma-Therm’s plasma dicing technology
– 2017
Plasma-Therm partners with memsstar to offer complete solutions for MEMS fabrication
– 2017
Plasma-Therm partners with memsstar to offer complete solutions for MEMS fabrication
– 2017
Plasma-Therm partners with memsstar to offer complete solutions for MEMS fabrication
– 2018
Acquired OEM Group Dry Process Business
– 2020
Acquired specialty engineering company, JLS Designs Ltd
– 2020
Acquired OEM Group Dry Process Business
Meet our executive team
These knowledgeable industry veterans collectively contribute >100 years of experience to process innovation.
ISO 9001:2015 Certified by NQA
CORPORATE SOCIAL RESPONSIBILITY
2023 TechInsights Customer Satisfaction Survey
PURCHASING TERMS
Passion and Purpose
Our total-solutions approach to equipment, processes, and outcomes is at the peak of performance, ease of use, repeatability, and reliability.
It’s a Team Effort
We know your needs may vary from the needs of others. That’s why we’re always ready to tailor your tools and process to your specifications. Some call this service. We call it teamwork.
Designed for Maximum Performance
Because you deserve the best performance possible, we continually improve our plasma-based process systems to exceed your expectations.
Results Measured by Your Experience
We trust that our teams and technologies will ensure you get the results you’re after. At the end of the day, we don’t define our results, you do.
We continuously evolve our plasma-based systems and solutions to match the changing needs of manufacturing and R&D environments. Today, the emerging markets for microelectronic technologies include 5G, power devices, sensors, photonics, renewable energy, AR/VR, data storage, analytics, and more. Our solutions work across the board to support the activation of these new technologies that are changing our lives. No matter which part of the ecosystem you work in, rest assured we can support your central manufacturing or R&D efforts. You can count on us to help you reach your process, yield, and capacity goals. Together, we’ll drive the progress of leading technologies that enhance the lives of people around the world.
