Shuttleline® Platform PECVD Supports Advanced Deposition Applications

April 1, 2026

Shuttleline® Platform PECVD Supports Advanced Deposition Applications

Plasma-Therm continues to see strong momentum for the Shuttleline® platform, supporting advanced research environments through flexible, high-performance PECVD processing.

The Shuttleline platform enables precise thin-film deposition with strong uniformity, process control, and scalability across a wide range of applications. Its flexible configuration supports both research and development and production environments.

With PlasmaBox PECVD technology, the Shuttleline platform supports advanced semiconductor processing, microfabrication, and emerging technology applications.

Read the full announcement:

Learn more about our deposition capabilities and advanced vacuum processing solutions.

Corial Shuttleline platform PECVD system for thin-film deposition
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